[8p-A411-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[8p-A411-9] Water Flow Recirculation Control in Batch-Type Silicon Wafer Wet Cleaner

Kento Miyazaki¹, 〇Miya Matsuo¹, Shogo Okuyama¹, Hitoshi Habuka¹, Akihiro Goto² (1.Yokohama Nat. Univ., 2.Pre-Tech)

Keywords:Wafer cleaning, Water flow, Flow visualization

The water flow in the silicon wafer wet etching bath was visualized and observed. The effect of the additional pin-hole exhaust set at the top wall was evaluated and discussed.