[8p-C18-1~8] 13.5 Semiconductor devices and related technologies

[8p-C18-6] Electrical characteristics of CeO_x MIM capacitors

〇Yoshitaka Takaku¹, Iriya Muneta¹, Takuya Hoshii¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui¹, Hiroshi Iwai², Kuniyuki Kakushima¹ (1.Tokyotech, 2.Tokyotech IIR)

Keywords:Cerium oxide, MIM capacitor