1:30 PM - 3:30 PM
[8p-PA1-16] Structural and Electrical Properties of Sc3+ or Fe3+-Doped TiO2-d Thin Films Prepared by Sputtering
Keywords:Oxide semiconductor
We have prepared the Sc or Fe-doped TiO2 thin film on Al2O3 substrate by RF magnetron sputtering. From the experimental results of conductivity and electronic strcuture, these thin flms exibited p-type oxide semiconductor at intermediated temperature region.