Kazuya Kadota

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 1:15 PM - 5:30 PM 424 (424)

Oral presentation
| CS Code-sharing session
| CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[14p-424-1~16] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

2:45 PM - 3:00 PM

[14p-424-7] Ultra-Compact Electron Beam Direct Writing Machine: Electron Optical System and Nano-level Multi-axis Stage

〇Kazuya Kadota¹, Koji Kosaka² (1.Nano Science Lab, 2.TCK Inc.)

Tue. Mar 14, 2017 1:15 PM - 5:00 PM 423 (423)

Oral presentation
| CS Code-sharing session
| CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[14p-423-1~14] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

4:00 PM - 4:15 PM

[14p-423-11] Complex and Deepening OPC (Optical Proximity effect Correction) : High Speed Writing Data Processing by GPGPU and Reduction of OPC Placements by Quadruple Pattern Technology

〇Kazuya Kadota¹, Kokoro Koto² (1.Nano Science Lab, 2.Nihon Synopsys G.K.)