Kazuto Ohsawa

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 2:00 PM - 5:00 PM 413 (413)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16p-413-1~11] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

4:45 PM - 5:00 PM

△ [16p-413-11] Dependence of the Mobility on Deposition Temperature and Al₂O₃ Thickness in MOSFETs with HfO₂/Al₂O₃/InGaAs Gate Stacks after H₂ Annealing

〇Kazuto Ohsawa¹, Shinji Noguchi¹, Seiko Netsu¹, Nobukazu Kise¹, Yasuyuki Miyamoto¹ (1.Tokyo Tech)