Hiroki Ohsawa

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 9:15 AM - 12:00 PM 304 (304)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[14a-304-1~10] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

10:15 AM - 10:30 AM

△ [14a-304-5] CMOS Inverter on Glass Substrate using V_th Control of Self-Aligned Four-Terminal Planar Metal Double-Gate Low-Temperature Poly- Si TFTs

〇Hiroki Ohsawa¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)