Naohisa Inoue

→ Search for Naohisa Inoue in Google Scholar

Speaker, Author, Co-Author

Tue. Mar 14, 2017 1:45 PM - 5:30 PM F201 (F201)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal evaluation, impurities and crystal defects

[14p-F201-1~14] 15.7 Crystal evaluation, impurities and crystal defects

5:00 PM - 5:15 PM

[14p-F201-13] Measurement of carbon concentration in silicon crystal(Ⅹ)Procedure down to 10¹⁴cm^-3

〇Naohisa Inoue^1,2, Kawamura Yuichi² (1.Tokyo Univ. Agri. & Technol., 2.Osaka Pref. Univ.)

5:15 PM - 5:30 PM

[14p-F201-14] Sensitivity and detection limit of carbon concentration measurement in silicon crystal
(2) Incorrect Detection limit

〇Naohisa Inoue¹ (1.Research integrity study Group)