Kotaro Natori

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 1:30 PM - 3:30 PM P3 (BP)

Poster presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[14p-P3-1~19] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

1:30 PM - 3:30 PM

[14p-P3-2] Photoelectron Holography of As doped in Si and Their Electrical Activity.

〇Kotaro Natori¹, Kazou Tsutsui¹, Tomohiro Matsushita², Takayuki Muro², Takuya Hoshii¹, Kuniyuki Kakushima¹, Hitoshi Wakabayashi¹, Koichi Hayashi³, Fumihiko Matsui⁴, Yoshitada Morikawa⁵, Masaru Shimomura⁶, Toyohiko Kinoshita² (1.Tokyo Tech., 2.JASRI, 3.Nagoya Inst. Tech, 4.Nara Inst. of Sci. and Tech., 5.Osaka Univ., 6.Shizuoka Univ.)

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