Reijiro Shimura

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 9:00 AM - 11:30 AM 304 (304)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[15a-304-1~10] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

9:00 AM - 9:15 AM

[15a-304-1] Optimization of lead ratio in a PZT solution for low-temperature process

〇(DC)Reijiro Shimura^1,2, Phan Trong Tue^1,2, Tatsuya Shimoda^1,2, Yuzuru Takamura^1,2 (1.JAIST, 2.CREST)