[15a-304-1~10] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[15a-304-1] Optimization of lead ratio in a PZT solution for low-temperature process

〇(DC)Reijiro Shimura^1,2, Phan Trong Tue^1,2, Tatsuya Shimoda^1,2, Yuzuru Takamura^1,2 (1.JAIST, 2.CREST)

Keywords:PZT, Solution process