Yoshiyuki Watanabe

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 9:00 AM - 11:30 AM 304 (304)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[15a-304-1~10] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

10:00 AM - 10:15 AM

[15a-304-5] Silicon MEMS Torsional Resonator with Electro Magnetic Driving and Inductive Sensing Functions

〇Yoshiyuki Watanabe¹, Mutsuto Katoh¹, Toru Yahagi¹, Yutaka Murakami¹, Yutaka Abe¹ (1.Yamagata Res Inst Tech)