Yukiaki Oono

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 9:00 AM - 12:15 PM 502 (502)

Oral presentation
| 21 Joint Session K
| 21.1 Joint Session K

[15a-502-1~12] 21.1 Joint Session K

12:00 PM - 12:15 PM

[15a-502-12] Development of Low Resistivity ITO Film Deposited at Low Temperature Sputtering (2)

〇Yukiaki Oono¹, Kobayashi Motoshi¹, Takahashi Hirohisa¹, Arai Makoto¹, Ishibashi Satoru¹ (1.ULVAC, Inc.)