Tetsuya Makimura

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Speaker, Author, Co-Author

Wed. Mar 15, 2017 1:30 PM - 6:30 PM 418 (418)

Symposium (Oral)
| Symposium
| Variety of light sources and possibilities of their applications to novel light processing

[15p-418-1~12] Variety of light sources and possibilities of their applications to novel light processing

4:00 PM - 4:30 PM

[15p-418-7] Micromachining using laser plasma EUV sources

〇Tetsuya Makimura¹, Hikari Urai¹, Daisuke Nakamura³, Akihiko Takahashi³, Hiroyuki Niino⁴, Tatsuo Okada² (1.Univ. of Tsukuba, 2.Kyusyu Univ., 3.Kyushu Univ., 4.AIST)

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