Yuan Tu

Speaker, Author, Co-Author

Wed. Mar 15, 2017 4:00 PM - 6:00 PM P14 (BP)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[15p-P14-1~11] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

4:00 PM - 6:00 PM

▲ [15p-P14-7] Atom Probe Tomographic Study on Implanted Deuterium in Al₂O₃/Hf_xSi_1-xO₂/SiO₂ Stacks

〇(D)Yuan Tu¹, Bin Han¹, Yasuo Shimizu¹, Yorinobu Kunimune², Yasuhiro Shimada², Masao Inoue³, Koji Inoue¹, Shinji Nagata¹, Yasuyoshi Nagai¹ (1.IMR Tohoku Univ., 2.Renesas Semiconductor Manufacturing Co., Ltd., 3.Renesas Electronics Corp.)

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