The 64th JSAP Spring Meeting, 2017

Presentation information

Poster presentation

13 Semiconductors » 13.3 Insulator technology

[15p-P14-1~11] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

Wed. Mar 15, 2017 4:00 PM - 6:00 PM P14 (BP)

4:00 PM - 6:00 PM

[15p-P14-7] Atom Probe Tomographic Study on Implanted Deuterium in Al2O3/HfxSi1-xO2/SiO2 Stacks

〇(D)Yuan Tu1, Bin Han1, Yasuo Shimizu1, Yorinobu Kunimune2, Yasuhiro Shimada2, Masao Inoue3, Koji Inoue1, Shinji Nagata1, Yasuyoshi Nagai1 (1.IMR Tohoku Univ., 2.Renesas Semiconductor Manufacturing Co., Ltd., 3.Renesas Electronics Corp.)

Keywords:high-k dielectric, derterium, atom probe