Satoshi Okubo

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 9:00 AM - 12:15 PM 413 (413)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[16a-413-1~12] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

10:45 AM - 11:00 AM

△ [16a-413-7] Electric current conduction in ALD-Al₂O₃ films with O₃ treatment

〇(B)Satoshi Okubo¹, Daisuke Matsumura¹, Atsushi Hiraiwa^2,4, Hiroshi Kawarada^1,2,3 (1.Waseda Univ., 2.RONL, Waseda Univ., 3.KMLMST, Waseda Univ., 4.IMaSS, Nagoya Univ.)

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