Takeshi Aizawa

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 9:00 AM - 12:15 PM E206 (E206)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[16a-E206-1~13] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

10:15 AM - 10:30 AM

[16a-E206-6] Development of Water Plasma Ashing Technology for Minimal Fabrication System

〇Takeshi Aizawa¹, Takeshi Yamada¹, Mitsunori Nogawa¹, Yasuhiro Onishi¹, Noriko Miura^1,3, Tatsuo Ishijima², Takuya Kitano², Hiroaki Suzuki², Arufa Shiota², Sommawan Khumpuang^3,4, Shiro Hara^3,4 (1.Yonekura MFG., 2.Kanazawa Univ., 3.Minimal, 4.AIST)

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