Makoto Baba

→ Search for Makoto Baba in Google Scholar

Speaker, Author, Co-Author

Thu. Mar 16, 2017 9:30 AM - 11:30 AM P4 (BP)

Poster presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[16a-P4-1~29] 13.8 Compound and power electron devices and process technology

9:30 AM - 11:30 AM

△ [16a-P4-8] Deposition and characterization of silicon dioxide film formed by surface-wave plasma enhanced chemical vapor deposition

〇Makoto Baba¹, Kondo Yutaka¹, Okada Hiroshi^2,1, Furukawa Masakazu³, Yamane Keisuke¹, Sekiguchi Hiroto¹, Wakahara Akihiro^1,2 (1.Toyohashi Univ.Tech, 2.EIIRIS, 3.ARLC)

▲