Takahide Umeda

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 9:30 AM - 11:30 AM P5 (BP)

Poster presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[16a-P5-1~15] 15.6 Group IV Compound Semiconductors (SiC)

9:30 AM - 11:30 AM

[16a-P5-11] Difference between dry-oxide and nitrided SiC-MOS interfaces studied by electrically-detected-magnetic-resonance (EDMR) spectroscopy

〇Takahide Umeda¹, Geonwoo Kim¹, Hironori Yoshioka², Ryouji Kosugi², Shinsuke Harada² (1.Univ. of Tsukuba, 2.AIST)