Anto Yasaka

→ Search for Anto Yasaka in Google Scholar

Speaker, Author, Co-Author

Thu. Mar 16, 2017 1:15 PM - 6:00 PM 315 (315)

Symposium (Oral)
| Symposium
| Recent GFIS microscopy technology and its future prospects for R & D of materials and devices

[16p-315-1~11] Recent GFIS microscopy technology and its future prospects for R & D of materials and devices

2:00 PM - 2:30 PM

▲ [16p-315-3] Mask Repair Technology using Gas Field Ion Source

〇Anto Yasaka^1,2, Fumio Aramaki¹, Tomokazu Kozakai¹, Osamu Matsuda¹ (1.Hitachi High-Tech Science, 2.Hitachi High-Technologies)