Nobuyoshi Saito

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 1:15 PM - 6:30 PM 412 (412)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices and related technologies

[16p-412-1~20] 13.5 Semiconductor devices and related technologies

6.1と13.3と13.5のコードシェアセッションあり

5:30 PM - 5:45 PM

[16p-412-17] High-mobility and H₂-anneal Tolerant InGaSiO/InGaZnO/InGaSiO Double Hetero Channel Thin Film Transistor for Si-LSI Compatible Process

〇Nobuyoshi Saito¹, Kentaro Miura¹, Tomomasa Ueda¹, Tsutomu Tezuka¹, Keiji Ikeda¹ (1.Toshiba corporation)