Akito Kuramata

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Speaker, Author, Co-Author

Thu. Mar 16, 2017 1:45 PM - 6:30 PM 502 (502)

Symposium (Oral)
| Symposium
| Process technology for advanced power semiconductor devices

[16p-502-1~10] Process technology for advanced power semiconductor devices

5:00 PM - 5:30 PM

[16p-502-8] Ga₂O₃ Wafer Process Technology for Power Devices

〇Akito Kuramata^1,2, Kimiyoshi Koshi^1,2, Kohei Sasaki^1,2, Ken Goto^1,2, Shinya Watanabe^1,2, Yu Yamaoka^1,2, Daiki Wakimoto^1,2, Quang Tu Thieu¹, Takekazu Masui^1,2, Shigenobu Yamakoshi^1,2, Hisashi Murakami³, Yoshinao Kumagai³, Masataka Higashiwaki⁴ (1.Novel Crystal Tech., 2.Tamura Corp., 3.Tokyo Univ. of Agri. & Tech., 4.NICT)