Gento Kuroda

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 9:00 AM - 11:30 AM 313 (313)

Oral presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[17a-313-1~10] 8.4 Plasma etching

9:15 AM - 9:30 AM

[17a-313-2] Syntheses of nano-crystals on Si substrates in etch process of CF₄/Ar plasmas

〇(M1)Gento Kuroda¹, Kazuo Takahashi¹, Koji Nishio¹ (1.Kyoto Inst. Technol.)