Kenichi Yoshikawa

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 9:00 AM - 11:30 AM 313 (313)

Oral presentation
| 8 Plasma Electronics
| 8.4 Plasma etching

[17a-313-1~10] 8.4 Plasma etching

10:15 AM - 10:30 AM

△ [17a-313-6] Ag film etching by using halogen gas plasma

〇Kenichi Yoshikawa¹, Atsuki Asano², Yudai Miyawaki², Kazuhito Furumoto¹, Toshiyuki Sasaki¹, Keisuke Kikutani¹, Hisataka Hayashi¹, Makoto Sekine², Masaru Hori² (1.Toshiba Corp., 2.Nagoya Univ.)

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