Yuji Sato

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Speaker, Author, Co-Author

Fri. Mar 17, 2017 1:45 PM - 3:30 PM E206 (E206)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17p-E206-1~7] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

1:45 PM - 2:00 PM

△ [17p-E206-1] Research on temperature dependence of substrate warpage of Cu thin film deposited on Si

〇Yuji Sato¹, Jun Fujita¹, Yusaku Ito¹, Hiroshi Kobayashi¹ (1.Mitsubishi Electric)