The 64th JSAP Spring Meeting, 2017

Presentation information

Print

Oral presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[14a-213-1~12] 6.4 Thin films and New materials

Tue. Mar 14, 2017 9:00 AM - 12:15 PM 213 (213)

Tamio Endo(Sagamihara Surface Lab.), Akifumi Matsuda(Titech)

12:00 PM - 12:15 PM

[14a-213-12] Influence of annealing conditions on properties of In-Ga-O semiconductor thin film deposited by sputtering with H2O introduction

〇Tokuyuki Nakayama1, Toshio Morimoto1, Mana Shiraki1, Fumihiko Matsumura1, Takuya Odakura2, Kousaku Shimizu2 (1.Sumitomo Metal Minig, 2.Nihon Univ.)

Keywords:oxide, semiconductor