Fabrication of flat surface ZION films on lattice mismatched substrate by RF magnetron sputtering

Presentation information

Oral presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

Tue. Mar 14, 2017 1:30 PM - 6:00 PM 419 (419)

5:00 PM - 5:15 PM

〇Nanoka Miyahara¹, Koichi Matsushima¹, Hyunwoong Seo¹, Kazunori Koga¹, Masaharu Shiratani¹, Naho Itagaki¹ (1.Kyushu Univ.)

Keywords:(ZnO)x(InN)1-x, sputtering, surface morphology