The 64th JSAP Spring Meeting, 2017

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CS Code-sharing session » CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[14p-423-1~14] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

Tue. Mar 14, 2017 1:15 PM - 5:00 PM 423 (423)

Shoji Hotta(Hitachi), Hiroki Yamamoto(Osaka Univ.)

2:15 PM - 2:30 PM

△ [14p-423-5] Resist Investigation Method using Molecular Orbit Calculation

〇(M1)Shohei Nagata1, Shota Niihara1, Tetsuo Harada1, Takeo Watanabe1 (1.LASTI; Univ. of Hyogo)

Keywords:resist, simulation, IR