Shohei Nagata

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 1:15 PM - 5:00 PM 423 (423)

Oral presentation
| CS Code-sharing session
| CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[14p-423-1~14] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

2:15 PM - 2:30 PM

△ [14p-423-5] Resist Investigation Method using Molecular Orbit Calculation

〇(M1)Shohei Nagata¹, Shota Niihara¹, Tetsuo Harada¹, Takeo Watanabe¹ (1.LASTI; Univ. of Hyogo)