The 64th JSAP Spring Meeting, 2017

Presentation information

Oral presentation

15 Crystal Engineering » 15.7 Crystal evaluation, impurities and crystal defects

[14p-F201-1~14] 15.7 Crystal evaluation, impurities and crystal defects

Tue. Mar 14, 2017 1:45 PM - 5:30 PM F201 (F201)

Koji Sueoka(Okayama Pref. Univ.), Satoshi Nakano(Kyushu Univ.)

2:45 PM - 3:00 PM

[14p-F201-5] Development of quantitative analysis for carbon concentration in silicon crystal using photoluminescence spectroscopy after electron irradiation via luminescence activation

Satoko Nakagawa1, Nagai Yuta1 (1.GlobalWafers Japan)

Keywords:photoluminescence, silicon, carbon