2:45 PM - 3:00 PM
[14p-F201-5] Development of quantitative analysis for carbon concentration in silicon crystal using photoluminescence spectroscopy after electron irradiation via luminescence activation
Keywords:photoluminescence, silicon, carbon
Presentation information
Oral presentation
15 Crystal Engineering » 15.7 Crystal evaluation, impurities and crystal defects
[14p-F201-1~14] 15.7 Crystal evaluation, impurities and crystal defects
Tue. Mar 14, 2017 1:45 PM - 5:30 PM F201 (F201)
Koji Sueoka(Okayama Pref. Univ.), Satoshi Nakano(Kyushu Univ.)