[14p-P1-1~25] 8 Plasma Electronics（Poster）

[14p-P1-17] Study on nitriding technique with quasi-atmospheric pressure utilizing a microwave excited nitrogen-based radical flow

〇Hirotomo Itagaki¹, Shingo Hirose², Jaeho Kim¹, Xuelun Wang³, Naoto Kumagai³, Hisato Ogiso², Hajime Sakakita^1,3 (1.AIST Electronics and Photonics Inst., 2.AIST Advanced Manufacturing Research Inst., 3.NU-AIST GaN-OIL Photonics Device team)

Keywords:plasma, radicals, nitriding