[15a-301-1~7] 8.2 Plasma measurements and diagnostics

△ [15a-301-5] Two-dimensional estimation of Ti excitation temperature and Ti vapor admixture ratio in the torch during Ti feedstock injection into the Ar induction thermal plasmas

〇Naoto Kodama¹, Yosuke Ishisaka¹, Kotaro Shimizu¹, Yasunori Tanaka¹, Yoshihiko Uesugi¹, Tatsuo Ishijima¹, Shiori Sueyasu², Shu Watanabe², Ketaro Nakamura² (1.Kanazawa Univ., 2.Nisshin Seifun Group Inc.)

Keywords:Thermal plasma, Optical emission spectroscopy

For metal material processing using induction thermal plasma (ICTP), admixture of metal vapor to the ICTP greatly changes plasma properties. Thus, estimation of spatial distribution of metal vapor admixture ratio is essential to investigate changing in plasma properties during processing. This report describes investigation results for spatial distribution of temperature and Ti vapor admixture ratio during Ti feedstock feeding into the Ar ICTP torch. Furthermore, spatial distribution of Ti atom and electron densities were also determined.