Oral presentation

[15a-301-1~7] 8.2 Plasma measurements and diagnostics

Wed. Mar 15, 2017 9:00 AM - 10:45 AM 301 (301)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

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9:00 AM - 9:15 AM

[15a-301-1] Estimation of Etching Rate Distribution Using Multiple Optical Emission Spectroscopy

〇Soichiro Eto¹, Takeshi Ohmori¹, Satomi Inoue² (1.Hitachi R&D Group, 2.Hitachi High-Technologies Corp.)

9:15 AM - 9:30 AM

▲ [15a-301-2] Behavior of Electron and Negative Ion Density in Very High Frequency Capacitively Coupled Plasma

〇Takayoshi Tsutsumi¹, Nishant Sirse², Albert Ellingboe², Makoto Sekine¹, Masaru Hori¹ (1.Nagoya Univ., 2.Dublin City Univ.)

9:30 AM - 9:45 AM

[15a-301-3] Measurement of Water Vapor Density in Dielectric Barrier Discharge Plasma with Gas-Liquid Interface for Synthesizing Performic Acid

〇Kunihide Tachibana¹, Toshihiro Nakamura¹, Mitsuo Kawasaki², Tatsuo Morita³ (1.Osaka Electro-Communication Univ., 2.Kyoto Univ., 3.PM Dimensions)

9:45 AM - 10:00 AM

[15a-301-4] High-resolved spatiotemporal measurements of helium metastable atom density in atmospheric pressure plasma using near infrared laser absorption spectroscopy.

〇Tomonori Hotta^1,2, Hiromasa Yamada^1,2, Atsushi Nonaka^1,2, Atsushi Okamoto³, Sumio Kitajima⁴, Masanori Fujiwara², Susumu Kato², Hirotomo Itagaki², Hajime Sakakita^1,2 (1.Univ. Tsukuba, 2.National Institute of Advanced Industrial Science and Technology., 3.Nagoya Univ., 4.Tohoku Univ.)

10:00 AM - 10:15 AM

△ [15a-301-5] Two-dimensional estimation of Ti excitation temperature and Ti vapor admixture ratio in the torch during Ti feedstock injection into the Ar induction thermal plasmas

〇Naoto Kodama¹, Yosuke Ishisaka¹, Kotaro Shimizu¹, Yasunori Tanaka¹, Yoshihiko Uesugi¹, Tatsuo Ishijima¹, Shiori Sueyasu², Shu Watanabe², Ketaro Nakamura² (1.Kanazawa Univ., 2.Nisshin Seifun Group Inc.)

10:15 AM - 10:30 AM

△ [15a-301-6] Effect of multiple ion species on sheath and presheath regions in an H₂ plasma

〇(M1)Koutarou Kawakami¹, Shusuke Nishiyama¹, Koichi Sasaki¹ (1.Hokkaido Univ.)

10:30 AM - 10:45 AM

[15a-301-7] [JSAP Young Scientist Award Speech] Collective Thomson scattering for laser produced high-Z plasmas for soft X-ray light source

〇Yuta Sato¹, Toshiaki Eguchi¹, Tsukiyama Syoichi¹, Raimu Fukada¹, Kentaro Tomita¹, Kiichiro Uchino¹ (1.Kyushu Univ.)

Sessions

8 Plasma Electronics » 8.2 Plasma measurements and diagnostics

[15a-301-1~7] 8.2 Plasma measurements and diagnostics

[15a-301-1] Estimation of Etching Rate Distribution Using Multiple Optical Emission Spectroscopy

▲ [15a-301-2] Behavior of Electron and Negative Ion Density in Very High Frequency Capacitively Coupled Plasma

[15a-301-3] Measurement of Water Vapor Density in Dielectric Barrier Discharge Plasma with Gas-Liquid Interface for Synthesizing Performic Acid

[15a-301-4] High-resolved spatiotemporal measurements of helium metastable atom density in atmospheric pressure plasma using near infrared laser absorption spectroscopy.

△ [15a-301-5] Two-dimensional estimation of Ti excitation temperature and Ti vapor admixture ratio in the torch during Ti feedstock injection into the Ar induction thermal plasmas

△ [15a-301-6] Effect of multiple ion species on sheath and presheath regions in an H₂ plasma

[15a-301-7] [JSAP Young Scientist Award Speech] Collective Thomson scattering for laser produced high-Z plasmas for soft X-ray light source

Authentication

Sessions

8 Plasma Electronics » 8.2 Plasma measurements and diagnostics

[15a-301-1~7] 8.2 Plasma measurements and diagnostics

[15a-301-1] Estimation of Etching Rate Distribution Using Multiple Optical Emission Spectroscopy

▲ [15a-301-2] Behavior of Electron and Negative Ion Density in Very High Frequency Capacitively Coupled Plasma

[15a-301-3] Measurement of Water Vapor Density in Dielectric Barrier Discharge Plasma with Gas-Liquid Interface for Synthesizing Performic Acid

[15a-301-4] High-resolved spatiotemporal measurements of helium metastable atom density in atmospheric pressure plasma using near infrared laser absorption spectroscopy.

△ [15a-301-5] Two-dimensional estimation of Ti excitation temperature and Ti vapor admixture ratio in the torch during Ti feedstock injection into the Ar induction thermal plasmas

△ [15a-301-6] Effect of multiple ion species on sheath and presheath regions in an H2 plasma

[15a-301-7] [JSAP Young Scientist Award Speech] Collective Thomson scattering for laser produced high-Z plasmas for soft X-ray light source

Authentication

△ [15a-301-6] Effect of multiple ion species on sheath and presheath regions in an H₂ plasma