[15a-301-1~7] 8.2 Plasma measurements and diagnostics

△ [15a-301-6] Effect of multiple ion species on sheath and presheath regions in an H₂ plasma

〇(M1)Koutarou Kawakami¹, Shusuke Nishiyama¹, Koichi Sasaki¹ (1.Hokkaido Univ.)

Keywords:sheath, electric field

We measured the structure of electric field of the sheath region in H₂ plasma and H₂-Ar mixture plasma by sautration spectroscopy.We measured the fine structure spectrum of Balmer-α line of hydrogen atom. The electric field was calculated by using change of the peak interval between transition of 2P_2/3-3D_2/3 and one of 2P_2/3-3D_2/5 by Stark effect. As a result, we observed the influence of multiple ion species for the structure of electric field of the sheath.