[15a-318-1~11] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[15a-318-2] Emission enhancement of laser produced plasma under N₂ atmosphere

〇Takeo Ejima¹, Maki Kishimot², Kunio Shinohara², Masataka Kado², Makoto Odagiri³, Noboru Kadonaka³, Shinichi Namba³ (1.Tohoku Univ., 2.QST, 3.Hiroshima Univ.)

Keywords:laser produced plasma, light source in soft X-ray region, light source in EUV

Emission enhancement of laser-produced plasma was newly observed under N₂ atmosphere. The intensity of the plasma emission that was produced when a Au target was irradiated by Gekko XII (λ=1053 nm, Power=120 J/pulse, Duration time=500 ps) under N₂ atmosphere is greater than that was produced when the target was irradiated in the vacuum. Tha same enhancement was also observed when the excitation laser was changed to a Nd:YAG laser (λ=1064 nm, Power< 1 J/pulse, Duration time= several ns). The details of the experiments will be presented.