The 64th JSAP Spring Meeting, 2017

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CS Code-sharing session » CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[15a-318-1~11] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

Wed. Mar 15, 2017 9:00 AM - 12:00 PM 318 (318)

Takeshi Higashiguchi(Utsunomiya Univ.), Takeo Ejima(Tohoku Univ.)

9:30 AM - 9:45 AM

[15a-318-3] Emission enhancement of laser produced plasma under He atmosphere

〇Takeo Ejima1, Ken-ichi Yamaki1 (1.IMRAM, Tohoku Univ.)

Keywords:laser produced plasma, light source in soft X-ray region, light source in EUV

Emission enhancement of laser-produced plasma was observed at Water wavelength region under N2 atmosphere. Same emission enhancement will be observed in EUV wavelength region was examined. The experiment was made by the use of a Nd:YAG laser and a W target. The emission enhancement was observed depending on wavelength regions. The details will be presented.