The 64th JSAP Spring Meeting, 2017

Presentation information

Print

Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[15a-412-1~10] 6.2 Carbon-based thin films

Wed. Mar 15, 2017 9:00 AM - 11:45 AM 412 (412)

Hideaki Yamada(AIST), Tsuyoshi Yoshitake(Kyushu Univ.)

11:30 AM - 11:45 AM

[15a-412-10] Effect of nitrogen-doping on Ultrananocrystalline diamond/hydrogenated amorphous carbon composite films prepared by coaxial arc plasma deposition

〇Hiroki Gima1, Yuki Katamune2, Ryota Ohtani3, Satoshi Koizumi3, Tsuyoshi Yoshitake1 (1.Kyushu Univ., 2.Kyutech, 3.NIMS)

Keywords:Ultrananocrystalline diamond, Coaxial arc plasma deposition