[15a-419-1~10] 6.3 Oxide electronics

▲ [15a-419-2] Synthesis and Characterization of ZnO and Al Doped ZnO Nanostructures by Using Advanced Spray Pyrolysis Deposition Technique

Sameera Attanayake¹, Ajith Bandara¹, Masayuki Okuya², 〇Kenji Murakami² (1.GSST, Shizuoka Univ., 2.GSIST, Shizuoka Univ)

Keywords:transparent conductive oxide, spray pyrolysis deposition, nanostructure

We have synthesized ZnO seed layers and Al-doped ZnO nanostructures continuously by using the Advanced Spray Pyrolysis Deposition technique. In this report the structures and the properties of synthesized layers are discussed.