[15a-419-1~10] 6.3 Oxide electronics

[15a-419-3] Impacts of Air Exposure of Sputter-Deposited ZnO Films on Electrical Characteristics

〇Naoto Takahashi¹, Jiesheng Zhang¹, Tadashi Saitoh¹, Shingo Sato¹, Yasuhisa Omura¹ (1.Kansai University)

Keywords:ZnO thin film, conductance, air exposure

It is anticipated that air-exposure of non-doped ZnO films degrades their electrical property. We examined the time evolution of electrical property of sputter-deposited and O2 (or N2) annealed ZnO films for 700 hrs; the films were exposed in the low-humidity air. It is found that the electrical property of the films is sufficiently stable independently of the ambient gas under the annealing process. XPS analysis suggests that carrier density of the films are not also influenced by the air exposure.