[15p-F204-1~19] 15.6 Group IV Compound Semiconductors (SiC)

[15p-F204-6] Electrical Characterization of Al-N Co-Doped 4H-SiC Grown by Different Methods

〇(M2)Akinobu Takeshita¹, Tatsuya Imamura¹, Kouta Takano¹, Kazuya Okuda¹, Hideharu Matsuura¹, Shiyang Ji², Takeshi Mitani², Kazuma Eto², Kazutoshi Kojima², Tomohisa Kato², Sadafumi Yoshida², Hajime Okumura² (1.OECU, 2.AIST)

Keywords:Co-dope