The 64th JSAP Spring Meeting, 2017

Presentation information

Oral presentation

15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)

[15p-F204-1~19] 15.6 Group IV Compound Semiconductors (SiC)

Wed. Mar 15, 2017 1:30 PM - 7:00 PM F204 (F204)

Takahiro Makino(QST), Masashi Kato(NITech)

3:00 PM - 3:15 PM

[15p-F204-6] Electrical Characterization of Al-N Co-Doped 4H-SiC Grown by Different Methods

〇(M2)Akinobu Takeshita1, Tatsuya Imamura1, Kouta Takano1, Kazuya Okuda1, Hideharu Matsuura1, Shiyang Ji2, Takeshi Mitani2, Kazuma Eto2, Kazutoshi Kojima2, Tomohisa Kato2, Sadafumi Yoshida2, Hajime Okumura2 (1.OECU, 2.AIST)

Keywords:Co-dope