[15p-P14-1~11] 13.3 Insulator technology

▲ [15p-P14-7] Atom Probe Tomographic Study on Implanted Deuterium in Al₂O₃/Hf_xSi_1-xO₂/SiO₂ Stacks

〇(D)Yuan Tu¹, Bin Han¹, Yasuo Shimizu¹, Yorinobu Kunimune², Yasuhiro Shimada², Masao Inoue³, Koji Inoue¹, Shinji Nagata¹, Yasuyoshi Nagai¹ (1.IMR Tohoku Univ., 2.Renesas Semiconductor Manufacturing Co., Ltd., 3.Renesas Electronics Corp.)

Keywords:high-k dielectric, derterium, atom probe