[15p-P14-1~11] 13.3 絶縁膜技術

▲ [15p-P14-7] Atom Probe Tomographic Study on Implanted Deuterium in Al₂O₃/Hf_xSi_1-xO₂/SiO₂ Stacks

〇(D)Tu Yuan¹、Han Bin¹、Shimizu Yasuo¹、Kunimune Yorinobu²、Shimada Yasuhiro²、Inoue Masao³、Inoue Koji¹、Nagata Shinji¹、Nagai Yasuyoshi¹ (1.IMR Tohoku Univ.、2.Renesas Semiconductor Manufacturing Co., Ltd.、3.Renesas Electronics Corp.)

キーワード：high-k dielectric, derterium, atom probe