The 64th JSAP Spring Meeting, 2017

Presentation information

Poster presentation

13 Semiconductors » 13.3 Insulator technology

[15p-P14-1~11] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

Wed. Mar 15, 2017 4:00 PM - 6:00 PM P14 (BP)

4:00 PM - 6:00 PM

[15p-P14-9] Fabrication and Evaluation of SrTa2O6 thin films by RF Magnetron Sputtering

Takanori Takahashi1, Takeshi Hoga1, Kanji Yasui2, Hisayuki Suematsu2, Yukiharu Uraoka3, Kiyoshi Uchiyama1 (1.National Institute of Technology, Tsuruoka College, 2.Nagaoka University of Technology, 3.Nara Institute of Science and Technology)

Keywords:gate insulator, thin film transistor