[15p-P14-1~11] 13.3 Insulator technology

[15p-P14-9] Fabrication and Evaluation of SrTa₂O₆ thin films by RF Magnetron Sputtering

〇Takanori Takahashi¹, Takeshi Hoga¹, Kanji Yasui², Hisayuki Suematsu², Yukiharu Uraoka³, Kiyoshi Uchiyama¹ (1.National Institute of Technology, Tsuruoka College, 2.Nagaoka University of Technology, 3.Nara Institute of Science and Technology)

Keywords:gate insulator, thin film transistor