[15p-P3-1~26] 6.3 Oxide electronics

[15p-P3-15] Layered-structure deposition of VO₂ on Al doped ZnO transparent conductive film and its transition properties

〇Kenta Sato¹, Hiroaki Hoshino¹, Md. Suruz Mian¹, Kunio Okimura¹, Yoshio Yasumori² (1.Tokai Univ., 2.Tokai Univ. Ctr. Educ. Res.)

Keywords:Vanadium dioxide, Zinc Oxide

VO₂ films were deposited on Al doped ZnO (AZO) transparent conductive layer by RF magnetron sputtering method. We investigated the electrical and optical properties of c-oriented AZO films and VO₂ films. VO₂ showed the resistance and infrared-light transmittance drop by insulator-metal transiton (IMT). We are going to show the electrical and optical properties of these films.