[15p-P3-1~26] 6.3 Oxide electronics

▲ [15p-P3-19] Cathodoluminescence Study of Oxygen Defects in SrTiO₃

〇JUN CHEN¹, SHUN ITO², TAKASHI SEKIGUCHI¹, TOYOHIRO CHIKYO¹ (1.NIMS, 2.Tohoku Univ.)

Keywords:cathodoluminescence, oxygen vacancy

Oxygen related defects in oxide materials are of great importance for the performance of oxide-based electronic devices. For instance, the resistive switching in many oxides is attributed due to the presence of oxygen vacancies. In this study, we will demonstrate the characterization of oxygen defects in SrTiO₃ based on cathodoluminescence (CL) study.