10:15 AM - 10:30 AM
[16a-E206-6] Development of Water Plasma Ashing Technology for Minimal Fabrication System
Keywords:minimal, ashing
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Thu. Mar 16, 2017 9:00 AM - 12:15 PM E206 (E206)
Masato Sone(Titech), Masahide Goto(NHK)
10:15 AM - 10:30 AM
Keywords:minimal, ashing