〇Nobuo Sasaki¹, Muhammad Arif², Yukiharu Uraoka² (1.Sasaki Consulting, 2.NAIST)

〇(B)Nozomu Tanaka¹, Akira Suwa^1,2, Daisuke Nakamura¹, Taizoh Sadoh¹, Hiroshi Ikenoue^1,2 (1.Kyushu Univ., 2.Department of Gigaphoton Next GLP, Kyushu Univ.)

〇Hiroki Tamaru¹, Hiroshi Ikenoue², Seiichiro Higashi¹ (1.Graduate School of Advanced Sciences of Matter, Hiroshima Univ., 2.Department of Gigaphoton Next GLP, Kyushu Univ.)

〇Taisei Harada¹, Futa Gakiya¹, Yuya Ishiki¹, Tatsuya Okada¹, Takashi Noguchi¹, Kanji Noda², Akira Suwa^2,3, Hiroshi Ikenoue³ (1.Univ. of the Ryukyus, 2.GiGAPHOTON Inc., 3.Dept. of Gigaphoton Next GLP)

〇Hiroki Ohsawa¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)

〇Ryosuke Nakashima¹, Hiroaki Hanafusa¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)

〇(D)Hiroshi Oka¹, Takashi Tomita¹, Takuji Hosoi¹, Takayoshi Shimura¹, Heiji Watanabe¹ (1.Osaka Univ.)

〇Hiroki Utsumi¹, Taisei Sasaki¹, Shunya Sekiguchi¹, Shoya Takeuchi¹, Hiroki Ohsawa¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)

〇(M1)Hiromu Harada¹, Higashi Seiichiro¹, Hanafusa Hiroaki¹, Shin ryota¹ (1.Hiroshima Univ)

〇(M1)Ryutatsu Mizukami¹, Shinji Takeshima¹, Tomonori Yamashita¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)

〇Daichi Takahara¹, Kaoru Toko¹, Ryota Yoshimine¹, Takashi Suemasu¹ (1.Univ. of Tsukuba)

〇Kotaro Natori¹, Kazou Tsutsui¹, Tomohiro Matsushita², Takayuki Muro², Takuya Hoshii¹, Kuniyuki Kakushima¹, Hitoshi Wakabayashi¹, Koichi Hayashi³, Fumihiko Matsui⁴, Yoshitada Morikawa⁵, Masaru Shimomura⁶, Toyohiko Kinoshita² (1.Tokyo Tech., 2.JASRI, 3.Nagoya Inst. Tech, 4.Nara Inst. of Sci. and Tech., 5.Osaka Univ., 6.Shizuoka Univ.)

〇kei nisikawa¹, Yoshio Uhara¹, Masatoshi Itoh¹, Sigeru Saito¹ (1.Tokyo.Univ.of Science)

〇Ryo Uchida¹, Kentaro Iwami¹, Norihiro Umeda¹ (1.Tokyo Univ. of Agri. & Tech.)

〇Seren Maeda¹, Rinnosuke Umeda¹, Takumi Tamane¹, Tomoki Huruichi¹, Toshio Uhara¹, Masatoshi Itoh¹, Shigeru Saito¹ (1.Tokyo Univ. of science)

〇Kazuya Onose¹, Tuyoshi Miura¹, Makoto Muta¹, Kei Nishikawa¹, Yoshio Uhara¹, Masatoshi Itoh¹, Shigeru Saitou¹ (1.Tokyo Univ. of Science)

〇Naoya Watanabe¹, Kikuchi Kikuchi², Azusa Yanagisawa², Haruo Shimamoto¹, Katsuya Kikuchi¹, Masahiro Aoyagi¹, Akio Nakamura² (1.AIST, 2.LAPIS Semiconductor)

〇(M2)Syo Sakata¹, Kosuke Hikichi², Hideki Hirano¹, Shuji Tanaka¹ (1.Tohoku Univ., 2.Technofine)

〇Satoshi Maruyama¹, Takeshi Hizawa¹, Kazuhiro Takahashi¹, Kazuaki Sawada¹ (1.Toyohashi Univ.Tech.)

〇Kengo Igawa¹, Sari Yanagida¹, Tso-Fu Mark Chang¹, Chun-Yi Chen¹, Masaki Tahara¹, Tomonari Inamura¹, Hideki Hosoda¹, Volodymyr A. Chernenko², Masato Sone¹ (1.Tokyo Tech., 2.Ikerbasque)

〇Takuma Suzuki^1,2, Tso-Fu Mark Chang^1,2, Chun-Yi Chen^1,2, Toshifumi Konishi³, Katsuyuki Machida^1,2,3, Hiroshi Toshiyoshi^2,4, Daisuke Yamane^1,2, Kazuya Masu^1,2, Masato Sone^1,2 (1.Tokyo Tech, 2.JST-CREST., 3.NTT AT Coap., 4.UTokyo)

〇Koichiro Tachibana^1,2, Tso-Fu Mark Chang^1,2, Chun-Yi Chen^1,2, Toshifumi Konishi³, Katsuyuki Machida^1,2,3, Hiroshi Toshiyoshi^2,4, Daisuke Yamane^1,2, Kazuya Masu^1,2, Masato Sone^1,2 (1.Tokyo Tech, 2.JST-CREST, 3.NTT AT Corp., 4.The University of Tokyo)

〇(B)Tomoki Iizuka¹, Daisuke Yamane¹, Toshifumi Konishi², Hiroyuki Ito¹, Noboru Ishihara¹, Katsuyuki Machida^1,2, Kazuya Masu¹ (1.Tokyo Tech, 2.NTT-AT)

〇Daisuke Yamane^1,4, Toshifumi Konishi², Teruaki Safu², Hideaki Nakajima^1,4, Minami Teranishi^1,4, Chun-Yi Chen^1,4, Tso-Fu Mark Chang^1,4, Masato Sone^1,4, Hiroshi Toshiyoshi^3,4, Kazuya Masu^1,4, Katsuyuki Machida^1,2,4 (1.Tokyo Tech., 2.NTT-AT, 3.The Univ. of Tokyo, 4.JST-CREST)

〇Hideaki Nakajima^1,2, Tso-Fu Mark Chang^1,2, Chun-Yi Chen^1,2, Toshifumi Konishi³, Katsuyuki Machida^1,2,3, Hiroshi Toshiyoshi^2,4, Daisuke Yamane^1,2, Kazuya Masu^1,2, Masato Sone^1,2 (1.Tokyo Tech, 2.JST-CREST, 3.NTT-AT, 4.Tokyo Univ.)

〇Toshifumi Konishi¹, Daisuke Yamane^2,4, Teruaki Safu¹, Masato Sone^2,4, Hiroshi Toshiyoshi^3,4, Kazuya Masu^2,4, Katsuyuki Machida^1,2,4 (1.NTT-AT, 2.Tokyo Tech., 3.Univ. of Tokyo, 4.JST-CREST)

〇TERUAKI SAFU¹, Toshifumi Konishi¹, Daisuke Yamane^2,4, Hiroshi Toshiyoshi^3,4, Masato Sone^2,4, Kazuya Masu^2,4, Katsuyuki Machida^1,2,4 (1.NTT-AT, 2.Tkyo Tech., 3.Univ. of Tokyo, 4.JST-CREST)

〇(D)Motohiro Takayasu^1,3, Toshiaki Gonda^1,3, Daisuke Yamane^1,3, Hiroyuki Ito^1,3, Toshifumi Konishi², Shiro Dosho^1,3, Noboru Ishihara^1,3, Katsuyuki Machida^1,2,3, Kazuya Masu^1,3 (1.Tokyo Tech., 2.NTT-AT, 3.JST-CREST)

〇(M2)Toshiaki Gonda^1,4, Motohiro Takayasu^1,4, Daisuke Yamane^1,4, Hiroyuki Ito^1,4, Toshifumi Konishi², Shiro Dosho^1,4, Noboru Ishihara^1,4, Hiroshi Toshiyoshi^3,4, Katsuyuki Machida^1,2,4, Kazuya Masu^1,4 (1.Tokyo Tech., 2.NTT-AT, 3.The Univ. of Tokyo, 4.JST-CREST)

〇(DC)Reijiro Shimura^1,2, Phan Trong Tue^1,2, Tatsuya Shimoda^1,2, Yuzuru Takamura^1,2 (1.JAIST, 2.CREST)

〇Ripak Park¹, Masao Nagase¹, Yasuhide Ohno¹ (1.Tokushima Univ.)

〇Yuki Yuasa¹, Etsuo Maeda¹, Reo Kometani¹ (1.The Univ. of Tokyo)

〇Eiichi Kondoh¹, Yuta Ogihara¹ (1.Univ. Yamanashi)

〇Yoshiyuki Watanabe¹, Mutsuto Katoh¹, Toru Yahagi¹, Yutaka Murakami¹, Yutaka Abe¹ (1.Yamagata Res Inst Tech)

〇(M2)Ryota Setoguchi¹, Yoshio Mita¹ (1.Univ. of Tokyo)

Yoshiyuki Okada¹, 〇Takuya Okada¹, Kentaro Kawai¹, Kenta Arima¹, Mizuho Morita¹ (1.Osaka Univ.)

〇Shuhei Onishi¹, Yongjoon Choi¹, Makoto Ishida¹, Kazuaki sawada¹, Hiromu Ishii¹, Katsuyuki Machida^2,3, Kazuya Masu³, Yasuhiko Nikaido⁵, Mitsumasa Saito⁵, Shinichi Yoshida⁴ (1.Toyohashi Univ, 2.NTT-AT, 3.Tokyo Inst, 4.Kyushu Univ, 5.Occupation Univ)

〇(D)Yusaku Maeda¹, Kohei Maeda¹, Hideki Kobara², Hirohito Mori², Hidekuni Takao¹ (1.Eng., Kagawa Univ., 2.Med., Kagawa Univ.)

〇Tomoaki Nakagawa^1,3, Yusaku Maeda^1,3, Muhammad Zafri¹, Hideki Kobara², Hirohito Mori^2,3, Hidekuni Takao^1,3 (1.Eng., Kagawa univ., 2.Med., Kagawa univ., 3.JST-CREST)

〇Takashi Yajima^1,2, Masaharu Yasui^1,2, Sommawan Khumpuang^1,2, Hitoshi Maekawa^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

〇kazushige sato¹, Takashi Chiba^1,3, Masao Terada^1,3, Shinichi Ikeda^1,2, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.Minimal Fab Development Association, 2.AIST, 3.Sakaguchi E.H VOC Corp)

〇Tetsuya Goto¹, Kei-ichiro Sato², Yuki Yabuta³, Shigetoshi Sugawa¹, Shiro Hara^4,5 (1.Tohoku Univ., 2.Kotec, 3.Seinan Industries, 4.AIST, 5.MINIMAL)

〇Hitoshi Habuka¹, Miya Matsuo¹, Ayami Yamada¹, Ning Li¹, Takanori Mikahara^2,3, Shin-ichi Ikeda^2,3, Yuuki Ishida^2,3, Shiro Hara^2,3 (1.Yokohama Nat. Univ., 2.MINIMAL, 3.AIST)

〇Shinichi Ikeda^1,2, Yuuki Ishida^1,2, Takanori Mikahara^1,2, Noriko Miura², Takahiro Ito³, Hitoshi Habuka⁴, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL, 3.ORIENTAL MOTOR, 4.YOKOHAMA National Univ.)

〇Takeshi Aizawa¹, Takeshi Yamada¹, Mitsunori Nogawa¹, Yasuhiro Onishi¹, Noriko Miura^1,3, Tatsuo Ishijima², Takuya Kitano², Hiroaki Suzuki², Arufa Shiota², Sommawan Khumpuang^3,4, Shiro Hara^3,4 (1.Yonekura MFG., 2.Kanazawa Univ., 3.Minimal, 4.AIST)

〇Hiroyuki Tanaka^1,2, Hisato Ogiso^1,2, Shizuka Nakano^1,2, Yoshiyuki Nozawa^2,3, Toshihiro Hayami^2,3, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL, 3.SPPT)

〇Sommawan Khumpuang^1,2, Norio Umeyama^1,2, Hiroyuki Tanaka^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

〇JUNYA KURUMIDA^1,2, Hiroyuki Tanaka^1,2, Norio Umeyama^1,2, Khumpuang Sommawan^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

〇Kazuhiro Koga^1,2, Fumito Imura^1,2, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

〇Yongxun Liu¹, Kazuhiro Koga^1,2, Sommawan Khumpuang^1,2, Masayoshi Ngao¹, Takashi Matsukawa¹, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

〇Masanori Iwata¹, Toru Mannami¹, Nobuyoshi Yamauchi¹, Kenji Miyake¹, Fumito Imura², Sommawan Khumpuang², Shiro Hara² (1.PMT, 2.AIST)

〇Fumito Imura^1,2, Takuya Koga², Michihiro Inoue¹, Arami Saruwatari^1,2, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.Minimal Fab)

〇Takuya Toma¹, Akira Suwa^1,2, Daichi Taniyama¹, Daisuke Nakamura¹, Hiroshi Ikenoue^1,2 (1.Kyushu Univ., 2.Department of Gigaphoton Next GLP, Kyushu Univ.)

〇Hayato Okamoto¹, Keisuke Yamamoto¹, Dong Wang¹, Hiroshi Nakashima² (1.IGSES, Kyushu Univ., 2.GIC, Kyushu Univ.)

〇Shuichi Noda¹, Yao-Jen Lee², Ti-Ji Hong³, Fu-Kuo Hsueh^2,3, Yiming Li³, Seiji Samukawa^1,3 (1.Tohoku Univ., 2.NDL, Taiwan, 3.NCTU, Taiwan)

〇(M1)Xuan Luo¹, Tomonori Nishimura¹, Takeaki Yajima¹, Akira Toriumi¹ (1.The Univ. of Tokyo)

〇Tomonori Nishimura¹, Takeaki Yajima¹, Akira Toriumi¹ (1.The Univ. of Tokyo)

〇Naoya Okada^1,2, Noriyuki Uchida¹, Toshihiko Kanayama¹ (1.AIST, 2.JST-PRESTO)

〇Yuya Tsukamoto¹, Weiguang Zuo¹, Shun-ichiro Ohmi¹ (1.Tokyo Tech)

〇Yoshinori Tokuda¹, Kazunori Harada¹, Satoshi Ishikawa¹, Shunsuke Imaizumi², So Takamoto², Satoshi Izumi² (1.Toshiba, 2.Univ. of Tokyo)

〇Tomohiro Nakamura¹, Wengchang Yeh¹, Shunichi Sato² (1.Shimane Univ., 2.Ricoh Co.)

〇Hideaki Tanimura¹, Hikaru Kawarazaki¹, Kazuhiko Fuse¹, Makoto Abe¹, Takayuki Aoyama¹, Shinnichi Kato¹, Ippei Kobayashi¹ (1.SCREEN Semiconductor Solutions Co., Ltd.)

〇Ryota Yoshimine¹, Kaoru Toko¹, Takashi Suemasu¹ (1.Univ. of Tsukuba)

〇Ryusuke Nakamura¹, Masayuki Okugawa¹, Hiroshi Numakura¹, Manabu Ishimaru², Hidehiro Yasuda³ (1.Osaka Pref. Univ., 2.Kyushu Inst. Univ., 3.Osaka Univ.)

〇Michiru Hogyoku¹, Takashi Izumida¹, Seiji Onoue¹ (1.Toshiba Corporation SDS Company)

〇Sumio Sugisaki¹, Matsuda Tokiyoshi¹, Mutsumi Kimura¹ (1.Ryukoku Univ.)

〇Yuji Sato¹, Jun Fujita¹, Yusaku Ito¹, Hiroshi Kobayashi¹ (1.Mitsubishi Electric)

〇ryo yokogawa¹, Takahiro Suzuki¹, Shuichiro Hashimoto², Shuhei Asada², Motohiro Tomita^2,3, Takanobu Watanabe², Atsushi Ogura¹ (1.Meiji Univ., 2.Waseda Univ., 3.JSPS Research Fellow)

〇(M2)Hiroki Yoshikawa¹, Shijo Nagao², Takahiko Sakaue³, Yoichi Kamikoriyama³, Takahumi Sasaki⁴, Noriko Kagami², Tohru Sugahara², Jinting Jiu², Katsuaki Suganuma² (1.Osaka Univ., 2.Osaka Univ. ISIR, 3.Mitsui Mining & Smelting, 4.Hikoshima Smelting)

〇(M2)Hiroki Yoshikawa¹, Shijo Nagao², Takahiko Sakaue³, Yoichi Kamikoriyama³, Takahumi Sasaki⁴, Akio Shimoyama², Tohru Sugahara², Jinting Jiu², Katsuaki Suganuma² (1.Osaka Univ., 2.Osaka Univ. ISIR, 3.Mitsui Mining & Smelting, 4.Hikoshima Smelting)

〇Katsuya Furuna¹, Jianbo Liang¹, Moeko Matsubara², Marwan Dhamrin², Yoshitaka Nishio², Naoteru Shigekawa¹ (1.Osaka City Univ., 2.Toyo Aluminium K.K.)

〇Ryutaro Suda¹, Mamiko Yagi¹, Akira Kojima¹, Jun-ichi Shirakashi¹, Nobuyoshi Koshida¹ (1.Tokyo Univ. of Agri. & Technol.)

〇Yusuke Omata¹, Takashi Aoki¹, Toshiyuki Sameshima², Tomohisa Mizuno¹ (1.Kanagawa Univ., 2.Tokyo Univ Agri. Tech.)