[16a-E206-1~13] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[16a-E206-9] Fabrication of SOI Optical Waveguide using Minimal Fab

〇JUNYA KURUMIDA^1,2, Hiroyuki Tanaka^1,2, Norio Umeyama^1,2, Khumpuang Sommawan^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

Keywords:Optical waveguide